Lithography #687118

Формат:
PDF книга
Объем:
405 стр
Язык:
английский
Правообладатель:
John Wiley & Sons Limited (prof)
Аннотация:

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Поделиться страницей